Oberhofer, A. ; Chen, J. ; Koh, K. ; Schrader, M. ; Shah, S. ; Venables, R. ; Young, C. ; Xu, M. ; Kuehn, R. ; Maher, D. ; Venables, D.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.573-, 1999. Warrendale, PA. MRS - Materials Research Society
Zafar, S. ; Poler, J. C. ; Irene, E. A. ; Xu, X. ; Hames, G. ; Kuehn, R. ; Wortman, J. J.
出版情報:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.325-, 1994. Pittsburgh, PA. MRS - Materials Research Society