Benton, J. L. ; Boone, T. ; Jacobson, D.C. ; Lin, Wen ; Wilk, G.D. ; Krautter, H. W. ; Rosamilia, J.M. ; Rafferty, C.S.
出版情報:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.181-191, 2001. Pennington, N.J.. Electrochemical Society
Chang, J. P. ; Krautter, H. W. ; Opila, R. L. ; Pal, C. S. ; Zhu, W.
出版情報:
Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.117-122, 1999. Warrendale, Pa.. Materials Research Society
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