1.

国際会議録
国際会議録
1. Hybrid BARC approaches for FEOL and BEOL intergration
Nakano, A. ; Okamoto, K. ; Yamamoto, Y. ; Kozawa, T. ; Tagawa, S. ; Kai, T. ; Nemoto, H. ; Shimokawa, T.
出版情報: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.436-448,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5753(1)
2.

国際会議録
国際会議録
2. Development of a Pulsing System with the Linac Based Slow Positron Beam
Tashiro, M. ; Honda, Y. ; Yamaguchi, T. ; Pujari, P.K. ; Kimura, N. ; Kozawa, T. ; Tagawa, S.
出版情報: Positron annihilation, ICPA-12 : Proceedings of the 12th International Conference on Positron Annihilation, August 6-12, 2000, München, Germany.  pp.664-666,  2001.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 363-365
3.

国際会議録
国際会議録
3. Development of a New Positron Beam for Coincident Studies with Laser Excitation
Honda, Y. ; Tashiro, M. ; Yamaguchi, T. ; Pujari, P.K. ; Kimura, N. ; Kozawa, T. ; Nishijima, S. ; Isoyama, G. ; Tagawa, S.
出版情報: Positron annihilation, ICPA-12 : Proceedings of the 12th International Conference on Positron Annihilation, August 6-12, 2000, München, Germany.  pp.667-669,  2001.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 363-365
4.

国際会議録
国際会議録
4. Difference between initial distributions of proton and counter anion in chemically amplified electron-beam resist [6153-41]
Kozawa, T. ; Yamamoto, H. ; Saeki, A. ; Tagawa, S.
出版情報: Advances in Resist Technology and Processing XXIII.  pp.615314-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6153