Transmission electron microscopy of defects in NMOS and PMOS structures
- 著者名:
Bourdillon,A.J. ( National Univ.of Singapore ) Koh,Y.G. ( National Univ.of Singapore ) Chiang,S.L. ( National Univ.of Singapore ) Lim,C.W. ( National Univ.of Singapore ) Kong,J.R. ( National Univ.of Singapore ) Guobing,C. ( Singapore Productivity and Standards Board ) - 掲載資料名:
- Microlithographic Techniques in IC Fabrication
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3183
- 発行年:
- 1997
- 開始ページ:
- 236
- 終了ページ:
- 242
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426109 [0819426105]
- 言語:
- 英語
- 請求記号:
- P63600/3183
- 資料種別:
- 国際会議録
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