1.

国際会議録
国際会議録
1. Determination of relationship between Rayleigh wave velocity and stress with laser Doppler velocimeter
He,L.F. ; Kobayashi,S.
出版情報: Third International Conference on Experimental Mechanics : 15-17 October, 2001, Beijing China.  pp.119-122,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4537
2.

国際会議録
国際会議録
2. Accurate proximity correction method with total-process proximity-based correction factor(TCF)
Hashimoto,K. ; Usui,S. ; Hasebe,S. ; Murota,M. ; Nakayama,T. ; Matsuoka,F. ; Inoue,S. ; Kobayashi,S. ; Yamamoto,K.
出版情報: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.224-233,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3334
3.

国際会議録
国際会議録
3. MD1:Optical disk system for digital video recording.
Narahara,T. ; Kobayashi,S. ; Hattori,M. ; Shimpuku,Y. ; Enden,G.van den ; Kahlman,J.A. ; Dijk,M.van ; Woudenberg,R.van
出版情報: ISOM/ODS '99 : joint international symposium on Optical Memory and Optical Data Strage 1999, 11-15 July 1999 Sheraton Kauai Resort, Koloa, Howaii.  pp.50-52,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3864
4.

国際会議録
国際会議録
4. Development of simplified process for KrF excimer halftone mask with chrome-shielding method
Kobayashi,S. ; Oka,N. ; Watanabe,K. ; Ohmori,K. ; Inoue,M. ; Iguchi,K.
出版情報: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.288-296,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3873
5.

国際会議録
国際会議録
5. 1- kW slab CO2 laser excited by a self-excited rf generator
Kobayashi,S. ; Terai,K. ; Tamangawa,T.
出版情報: XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 25-30 August 1996, Heriot-Watt University, Edinburgh, UK.  pp.92-95,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3092
6.

国際会議録
国際会議録
6. Infrared image target detection process using continuous features
Kikuchi,M. ; Tamura,H. ; Ono,M. ; Miyauchi,H. ; Kobayashi,S.
出版情報: Automatic target recognition X : 26-28 April 2000, Orlando, USA.  pp.465-475,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4050
7.

国際会議録
国際会議録
7. Hierarchical processing for accurate optical proximity correction for 1-Gb DRAM metal layers
Kobayashi,S. ; Uno,T. ; Yamamoto,K. ; Tanaka,S. ; Kotani,T. ; Inoue,S. ; Higurashi,H. ; Watanabe,S. ; Yano,M. ; Ohki,S. ; Tsunakawa,K.
出版情報: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.614-621,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3679
8.

国際会議録
国際会議録
8. GBR(groove baseband recording)for an optical disk ROM
Kobayashi,S. ; Horigome,T. ; Yamatsu,H. ; Masuhara,S. ; Saito,K.
出版情報: Optical data storage 2000 : 14-17 May, 2000, Whistler, Canada.  pp.12-15,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4090
9.

国際会議録
国際会議録
9. Morphology of Oxide Precipitates in Czochralski Silicon Crystals
Sueoka,K. ; Ikeda,N. ; Yamamoto,T. ; Kobayashi,S.
出版情報: Shallow Impurities in Semiconductors : Proceedings of the Fifth International Conference on Shallow Impurities in Semiconductors "Physics and Control of Impurities", International Conference Center Kobe, Japan, 5 to 8 August, 1992.  pp.523-524,  1993.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 117-118
10.

国際会議録
国際会議録
10. Generation of Oxidation Induced Stacking Faults in CZ Silicon Wafers
Sueoka,K. ; Akatsuka,M. ; Nishihara,K. ; Yamamoto,T. ; Kobayashi,S.
出版情報: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1737-1742,  1995.  Zurich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 196-201