GRAIN GROWTH IN TITANIUM SILICIDE FILMS DURING THE FORMATION REACTION

GRAIN GROWTH IN TITANIUM SILICIDE FILMS DURING THE FORMATION REACTION

著者名:

掲載資料名:

Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

202

発行年:

1991

開始ページ:

137

終了ページ:

142

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990944 [1558990941]

言語:

英語

請求記号:

M23500/202

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015686
シリーズID:	PA00000011
会議名:	Symposium on evolution of thin-film and surface microstructure
回次:	1990
会議開催地:	Boston, MA, USA
会議開催年:	1990.11.26-1990.12.01

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1 国際会議録 Grain Growth in Titanium Disilicide and its Effect Upon Reaction Kinetics King,A.H., Corcoran,Y.L. Trans Tech Publications	7 国際会議録 STRESS EVOLUTION DURING THE FORMATION AND TRANSFORMATION OF TITANIUM SILICIDE Svilan, V., Harper, J. M. E., Cabral, C., Jr., Clevenger, L. A. MRS - Materials Research Society
2 国際会議録 GRAIN GROWTH SUPPRESSION AND ENHANCEMENT BY INTERDIFFUSION IN THIN FILMS King, Alexander H., Harris, Karen E. MRS - Materials Research Society	8 国際会議録 The Influence of Stress on the Growth of Titanium Silicide Thin Films on (001) Silicon Substrates Cheng, S. L., Chang, S. M., Huang, H. Y., Peng, Y. C., Chen, L. J., Tsui, B. Y., Tsai, C. J., Guo, S. S. MRS - Materials Research Society
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5 国際会議録 Grain Rotation in Thin Films of Gold King, Alexander H., Harris, Karen E. MRS - Materials Research Society	11 国際会議録 Grain Boundary Curvature in Polycrystalline Metallic Thin Films King, Alexander H., Mangat, Rakesh, Owusu-Boahen, Kwame Materials Research Society
6 国際会議録 Hillock Formation in Tensile Loaded Films Harris, Karen E., King, Alexander H. MRS - Materials Research Society	12 国際会議録 SILICON CONSUMPTION DURING SELF-ALIGNED TITANIUM SILICIDE FORMATION ON SHALLOW JUNCTIONS Smith, P.L., Osburn, C.M., Wen, D.S., McGuire, G. Materials Research Society

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