Keys, P. H. ; Brindos, R. ; Krishnamoorthy, V. ; Puga-Lambers, M. ; Jones, K. S. ; Law, Mark E.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B6.6-, 2001. Warrendale, PA. Materials Research Society
Keys, P. H. ; Li, J. H. ; Heitman, E. ; Packan, P. A. ; Law, M. E. ; Jones, K. S.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.199-, 1999. Warrendale, PA. MRS - Materials Research Society
Gossmann, Hans-Joachim L. ; Rafferty, Conor S. ; Keys, P. H.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B1.2-, 2001. Warrendale, PA. Materials Research Society