Pulsed laser annealing effects in high dose rate silicon implants
- 著者名:
Williams, J.S. ( R.M.I.T. Melbourne, 3000, Australia ) Pogany, A.P. ( R.M.I.T. Melbourne, 3000, Australia ) Beanland, D.G. ( R.M.I.T. Melbourne, 3000, Australia ) Chivers, D.J. ( Harwell Research Laboratories, Didcot, England ) Kenny, M.J. ( AAEC Research Establishment, Lucas Heights, Australia ) Rose, A. ( AAEC Research Establishment, Lucas Heights, Australia ) Scott, M.D. ( AAEC Research Establishment, Lucas Heights, Australia ) - 掲載資料名:
- Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposia proceedings
- シリーズ巻号:
- 1
- 発行年:
- 1981
- 開始ページ:
- 169
- 終了ページ:
- 175
- 出版情報:
- New York: North Holland
- ISSN:
- 02729172
- ISBN:
- 9780444005953 [0444005951]
- 言語:
- 英語
- 請求記号:
- M23500/1
- 資料種別:
- 国際会議録
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