1.

国際会議録
国際会議録
1. Capabilities of TOF-SIMS to Study the Influence of Different Oxidation Conditions on Metal Contamination Redistribution
Witte,H.De ; Cendt,S.De ; Douglas,M. ; Connard,T. ; Kenis,K. ; Mertens,P.W. ; Vandervorst,W. ; Gijbels,R.
出版情報: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.147-159,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3895
2.

国際会議録
国際会議録
2. Lattice Defects in High Quality As-Grown CZ Silicon,Studied with Light Scattering and Preferential Etching Techniques
Vanhellemont,J. ; Kissinger,G. ; Graf,D. ; Kenis,K. ; Depas,M. ; Mertens,P. ; Lambert,U. ; Heyns,M. ; Claeys,C. ; Richter,H. ; Wagner,P.
出版情報: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1755-1760,  1995.  Zurich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 196-201