Levy, Y. ; Ballestad, A. ; Davies, M. ; Feng, Y. ; Kelson, I. ; Mandeville, W. J. ; Pacradouny, V. ; Schmalz, A. ; Tiedje, T. ; Young, J. F.
出版情報:
In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.. pp.29-, 1999. Warrendale, PA. MRS - Materials Research Society