1.

国際会議録
国際会議録
1. Deposition Profile Control of Carbon Films on Patterned Substrates Using a Hydrogen-Assited Plasma CVD Method
Takuya Nomura ; Kazunori Koga ; Masaharu Shiratani ; Yuichi Setsuhara ; Makoto Sekine ; Masaru Hori
出版情報: Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A..  pp.203-208,  2010.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 1222
2.

国際会議録
国際会議録
2. High Rate Deposition of Cluster-Suppressed Amorphous Silicon Films Deposited Using a Multi-Hollow Discharge Plasma CVD
Kazunori Koga ; Hiroshi Sato ; Yuuki Kawashima ; William M. Nakamura ; Masaharu Shiratani
出版情報: Photovoltaic materials and manufacturing issues II : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.  pp.217-222,  2010.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 1210
3.

国際会議録
国際会議録
3. In-situ Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances
Yeonwon Kim ; Kosuke Hatozaki ; Yuji Hashimoto ; Hyunwoong Seo ; Giichiro Uchida ; Kunihiro Kamataki ; Naho Itagaki ; Kazunori Koga ; Masaharu Shiratani
出版情報: Amorphous and polycrystalline thin-film silicon science and technology - 2012 : symposium held April 9-13, 2012, San Francisco, California, U.S.A..  pp.307-312,  2012.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 1426
4.

国際会議録
国際会議録
4. The Optical Analysis and Application of Size-controllable Si Quantum Dots Fabricated by Multi-hollow Discharge Plasma Chemical Vapor Deposition
Hyunwoong Seo ; Yuting Wang ; Giichiro Uchida ; Kunihiro Kamataki ; Naho Itagaki ; Kazunori Koga ; Masaharu Shiratani
出版情報: Amorphous and polycrystalline thin-film silicon science and technology - 2012 : symposium held April 9-13, 2012, San Francisco, California, U.S.A..  pp.313-318,  2012.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 1426
5.

国際会議録
国際会議録
5. Characteristics of Stable A-Si:H Schottoky Cells Fabricated by Suppressing Cluster Deposition
Masaharu Shiratani ; Kosuke Hatozaki ; Yuji Hashimoto ; Yeonwon Kim ; Hyunwoong Seo ; Kunihiro Kamataki ; Giichiro Uchida ; Naho Itagaki ; Kazunori Koga
出版情報: Amorphous and polycrystalline thin-film silicon science and technology - 2012 : symposium held April 9-13, 2012, San Francisco, California, U.S.A..  pp.377-382,  2012.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 1426