1.

国際会議録
国際会議録
1. Experimental Study of Degradation of Mechanical Strength of Silicon Wafer Caused by LSI Processes
Yagishita,A. ; Fujii,O. ; Numano,M. ; Kawamura,N. ; Iwase,M. ; Ushiku,Y. ; Arikado,T.
出版情報: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.441-451,  1997.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3322
2.

国際会議録
国際会議録
2. Multibeam light source using optical waveguide for optical recording
Okumura,H. ; Arai,K. ; Kawamura,N. ; Tokumaru,H. ; Okuda,H.
出版情報: Optical data storage 2000 : 14-17 May, 2000, Whistler, Canada.  pp.329-334,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4090
3.

国際会議録
国際会議録
3. Active vibration suppression on an image of a scanning electron microscope
Matsuda,K. ; Kawamura,N. ; Kanemitsu,Y. ; Kijimoto,S. ; Watanabe,K. ; Izumi,E.
出版情報: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.622-630,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3998
4.

国際会議録
国際会議録
4. X-ray optics for modulation spectroscopy
Suzuki,M. ; Kawamura,N. ; Ishikawa,T.
出版情報: Advances in X-ray optics : 2-4 August 2000, San Diego, USA.  pp.140-149,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4145