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Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.68-80, 1999. Pennington, N.J.. Electrochemical Society
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出版情報:
Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes. pp.144-154, 1997. Pennington, NJ. Electrochemical Society
Yu, L. S. ; Guan, Z. F. ; Deng, F. ; Liu, Q. Z. ; Pappert, S. A. ; Yu, P. K. L. ; Lau, S. S. ; Redwing, J. ; Geisz, J. ; Kuech, T. F. ; Kattelus, H. ; Suni, I.
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Growth, processing, and characterization of semiconductor heterostructures : Symposium held November 29-December 2, 1993, Massachusetts, U.S.A.. pp.251-, 1994. Pittsburgh. MRS - Materials Research Society
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High temperature silicides and refractory alloys : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. /editors, C.L. Briant ... [et al.]. pp.279-, 1994. Pittsburg, PA. MRS - Materials Research Society