GROWTH AND CHARACTERIZATION OF FERROELECTRIC Pb(Zr,Ti)O3 THIN FILMS BY MOCVD USING A 6 INCH SINGLE WAFER CVD SYSTEM
- 著者名:
Shimizu, Masaru Fujimoto, Masashi Katayama, Takuma Shiosaki, Tadashi Nakaya, Kenichi Fukagawa, Mitsuru Tanikawa, Eiki - 掲載資料名:
- Ferroelectric thin films III : symposium held April 13-16, 1993, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 310
- 発行年:
- 1992
- 開始ページ:
- 255
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992061 [1558992065]
- 言語:
- 英語
- 請求記号:
- M23500/310
- 資料種別:
- 国際会議録
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