Itoh, M. ; Kawai, Y. ; Ito, S. ; Yokomizo, K. ; Katakura, Y. ; Fukuda, Y. ; Ichikawa, F.
出版情報:
Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.331-336, 2001. Pennington, N.J.. Electrochemical Society
Ichikawa, F. ; Nagatomo, Y. ; Katakura, Y. ; Itoh, S. ; Matsuhashi, H. ; Hirashita, N. ; Baba, S.
出版情報:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.123-132, 2003. Pennington, N.J.. Electrochemical Society