Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.384-391, 1994. Pennington, NJ. Electrochemical Society
Daffron, C. ; Torek, K. ; Ruzyllo, J. ; Kamieniecki, E.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.281-287, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.401-408, 1994. Pennington, NJ. Electrochemical Society
Danel, A. ; Straube, U. ; Kamarinos, G. ; Kamieniecki, E. ; Tardif, F.
出版情報:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.400-407, 1997. Pennington, NJ. Electrochemical Society
Roman, P. ; Kashkoush, I. ; Novak, R.E. ; Kamieniecki, E. ; Ruzyllo, J.
出版情報:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.344-349, 1995. Pennington, NJ. Electrochemical Society
Roman, P. ; Tsai, C.-L. ; Hengstebeck, R. ; Pantano, C. ; Berry, J. ; Kamieniecki, E. ; Ruzyllo, J.
出版情報:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.145-149, 1999. Pennington, NJ. Electrochemical Society
Roman, P. ; Lee, D. ; Mumbauer, P. ; Grant, R. ; Kamieniecki, E. ; Ruzyllo, J.
出版情報:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.187-192, 2000. Pennington, N.J.. Electrochemical Society
Lukasiak, L. ; Kamieniecki, E. ; Jakubowski, A. ; Ruzyllo, J.
出版情報:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.425-430, 2003. Pennington, N.J.. Electrochemical Society
Roman, P. ; Hwang, D. ; Torek, K. ; Ruzyllo, J. ; Kamieniecki, E.
出版情報:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.401-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Roman, P. ; Lee, D.D. ; Wang, J. ; Mumbauer, P. ; Grant, R. ; Tower, J. ; Kamieniecki, E. ; Lukasiak, L. ; Ruzyllo, aud J.
出版情報:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.207-212, 2001. Pennington, N.J.. Electrochemical Society