Albano, C. ; Sciamanna, R. ; Delgado, G. ; Kaiser, D.
出版情報:
ANTEC 2000 Conference proceedings, May 7-11, 2000, Orlando, Florida. pp.1652-1656, 2000. Brookfield Center, CT. Society of Plastics Engineers, Inc. (SPE)
シリーズ名:
Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Kramer, U. ; Marschner, T. ; Kaiser, D. ; Winking, M. ; Stief, C. ; Ventola, S. ; Lewitzki, D. ; Abraham, Z. ; Menadeva, O. ; Shukrun, S.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XX. pp.61520L-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering