Chen, Y. ; Kahng, A.B. ; Robins, G. ; Zelikovsky, A.
出版情報:
Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA. pp.421-432, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA. pp.390-400, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.233-245, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Gupta, P. ; Kahng, A.B. ; Sylvester, D. ; Yang, J.
出版情報:
Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA. pp.123-133, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.75-86, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Photomask and Next-Generation Lithography Mask Technology X. pp.718-726, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering