Degraeve, R. ; Kaczer, B. ; Roussel, Ph. ; Groeseneken, G.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.475-488, 2002. Pennington, NJ. Electrochemical Society
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.173-198, 2003. Pennington, N.J.. Electrochemical Society
Groeseneken, G. ; Degraeve, R. ; Kaczer, B. ; Maes, H. E.
出版情報:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.295-, 2000. Warrendale, PA. MRS-Materials Research Society
Pantisano, L. ; Schreurs, D. ; Kaczer, B. ; Simoen, E. ; Groeseneken, G.
出版情報:
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium. pp.224-238, 2004. Pennington, N.J.. Electrochemical Society
Degraeve, R. ; Kaczer, B. ; Roussel, Ph. ; Groeseneken, G.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.475-488, 2002. Pennington, NJ. Electrochemical Society
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