A. Bayer ; F. Barkusky ; C. Peth ; H. Tottger ; K. Mann
出版情報:
Photon processing in microelectronics and photonics VI : 22-25 January 2007, San Jose, California, USA. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Laser resonators and beam control IX : 22-24 January, 2007, San Jose, California, USA. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
F. Barkusky ; A. Bayer ; C. Peth ; H. Toettger ; K. Mann
出版情報:
Damage to VUV, EUV, and X-ray optics : 18-19 April 2007,Prague, Czech Republic. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Photon processing in microelectronics and photonics VII : 21-24 January 2008, San Jose, California, USA. pp.68791M-1-68791M-10, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering