Yoon, Y.-G. ; Kim, T.-K. ; Kim, K.-B. ; .Choi, J.-Y ; Lee, B.-I ; Joo, S.-K.
出版情報:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium. pp.337-344, 2000. Pennington, NJ. Electrochemical Society
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1545-1550, 1997. Pennington, NJ. Electrochemical Society
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.197-202, 1993. Pittsburgh, Pa.. Materials Research Society
Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.283-294, 1994. Pennington, NJ. Electrochemical Society