1.

国際会議録
国際会議録
1. INVITED: CHALLENGES OF DOPING ULTRA-SHALLOW TRANSISTOR JUNCTIONS FOR OlGA-SCALE DEVICES
Current, M. ; Ishida, E. ; Larson, L.A. ; Jones, E.C.
出版情報: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1196-1212,  1998.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 98-1(2)
2.

国際会議録
国際会議録
2. Characterization And Monitoring Of Silicon-On-Insulator Fabrication Processes By High-Resolution X-Ray Diffraction
Cohen, G.M. ; Mooney, P.M. ; Park, H. ; Cabral, C., Jr. ; Jones, E.C.
出版情報: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.89-94,  2002.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 717