Guarini, K.W ; Topol, A.W. ; Jeong, M. ; Bernstein, K. ; Xju, K. ; Joshi, R.V. ; Yu, R. ; Ski, L. ; Newport, M.R. ; Singh, D.V. ; Cohen, G.M. ; Pogge, H.B. ; Purushothaman, S. ; Haensch, W.E.
出版情報:
Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium. pp.390-404, 2003. Pennington, N.J.. Electrochemical Society
Biamonte, J. D. ; Jeong, M. ; Lee, J. -S. ; Perkowski, M. A.
出版情報:
Fluctuations and noise in photonics and quantum optics III : 24-26 May 2005, Austin, Texas, USA. pp.194-205, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.185-196, 2003. Pennington, N.J.. Electrochemical Society
国際会議録
テクニカルペーパー
