Lee, K.-B. ; Kwak, N.-J. ; Kim, S.-D. ; Kim, C.-T. ; Fu, J. ; Nahm, M.K. ; Diaz, R. ; Lai, C.S. ; Xu, Z. ; Han, B.B. ; Park, J.-G. ; Jang, W.
出版情報:
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.333-338, 1997. Pennington, NJ. Electrochemical Society
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.323-328, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering