Salnick, Alex ; Nicolaides, Lena ; Opsal, Jon ; Jain, Amitabh ; Rogers, Duncan ; Robertson, Lance
出版情報:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.469-474, 2004. Warrendale, Pa.. Materials Research Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.229-240, 2004. Warrendale, Pa.. Materials Research Society
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.129-134, 2002. Warrendale, Pa.. Materials Research Society
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.481-, 1997. Pittsburg, Pa.. MRS - Materials Research Society