Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.. pp.141-146, 2011. Warrendale, Pa.. Materials Research Society
A. Joskowiak ; V. Chu ; D.M.F. Prazeres ; J.P. Conde
出版情報:
Amorphous and polycrystalline thin-film silicon science and technology--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A.. pp.435-440, 2012. Warrendale, Pa.. Materials Research Society
Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.. pp.85-90, 2011. Warrendale, Pa.. Materials Research Society
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