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出版情報:
Proceedings of the International Conference on Colloid and Surface Science, Tokyo, Japan, November 5-8, 2000 : 25th Anniversary of the Division of Colloid and Surface Chemistry, the Chemical Society of Japan. pp.1025-1030, 2001. Amsterdam. Elsevier
Ohguro, T. ; Nakamura, S. ; Saito, M. ; Ono, S. ; Harakawa, H. ; Morifuji, E. ; Yoshitomi, T. ; Morimoto, T. ; Momose, H.S. ; Katsumata, Y. ; Iwai, H.
出版情報:
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.275-296, 1997. Pennington, NJ. Electrochemical Society
Momose, H.S. ; Ohguro, T. ; Nakamura, S. ; Katsumata, Y. ; Iwai, H.
出版情報:
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.235-246, 1997. Pennington, NJ. Electrochemical Society
Tsutsui, K. ; Sasaki, Y. ; Jin, C.-G. ; Tamura, H. ; Mizuno, B. ; Higaki, R. ; Soto, T. ; Majima, K. ; Ohmi, S.-I. ; Iwai, H.
出版情報:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.106-111, 2004. Pennington, NJ. Electrochemical Society
Ohguro, T. ; Naruse, H. ; Sugaya, H. ; Nakamura, S. ; Sugiyama, N. ; Morifuji, E. ; Kimijima, H. ; Yoshitomi, T. ; Morimoto, T. ; Momose, H.S. ; Katsumata, Y. ; Iwai, H.
出版情報:
ULSI process integration : proceedings of the first international symposium. pp.123-142, 1999. Pennington, NJ. Electrochemical Society
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.325-327, 2002. Pennington, NJ. Electrochemical Society
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium. pp.452-463, 2004. Pennington, N.J.. Electrochemical Society