1.

国際会議録
国際会議録
1. Rectifiers for suppressing depolarization caused by differential transmission and phase shift in high NA lenses
Shribak,M.I. ; Inoue,S. ; Oldenbourg,R.
出版情報: Polarization analysis, measurement, and remote sensing IV : 29-31 July 2001, San Diego, USA.  pp.163-174,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4481
2.

国際会議録
国際会議録
2. Practical measurement system for determination of refractive index and thickness using low-coherence interferometry
Maruyama,H. ; Inoue,S. ; Ohmi,M. ; Ihara,K. ; Nakagawa,S. ; Haruna,M.
出版情報: Optical engineering for sensing and nanotechnology (ICOSN '99) : 16-18 June 1999, Yokohama, Japan.  pp.26-29,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3740
3.

国際会議録
国際会議録
3. Accurate proximity correction method with total-process proximity-based correction factor(TCF)
Hashimoto,K. ; Usui,S. ; Hasebe,S. ; Murota,M. ; Nakayama,T. ; Matsuoka,F. ; Inoue,S. ; Kobayashi,S. ; Yamamoto,K.
出版情報: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.224-233,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3334
4.

国際会議録
国際会議録
4. Effective exposure-dose measurement in optical microlithography
Inoue,S. ; Fujisawa,T. ; Izuha,K.
出版情報: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.810-818,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3998
5.

国際会議録
国際会議録
5. 130-nm KrF lithography for DRAM production with 0.68-NA scanner
Kawamura,E. ; Nagai,K. ; Kanemitsu,H. ; Tabata,Y. ; Inoue,S.
出版情報: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.927-934,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4000
6.

国際会議録
国際会議録
6. Hierarchical processing for accurate optical proximity correction for 1-Gb DRAM metal layers
Kobayashi,S. ; Uno,T. ; Yamamoto,K. ; Tanaka,S. ; Kotani,T. ; Inoue,S. ; Higurashi,H. ; Watanabe,S. ; Yano,M. ; Ohki,S. ; Tsunakawa,K.
出版情報: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.614-621,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3679
7.

国際会議録
国際会議録
7. Polysilicon TFT on plastics
Shimoda,T. ; Inoue,S. ; Utsunomiya,S.
出版情報: Flat panel display technology and display metrology II : 22-23 January 2001, San Jose, [California] USA.  pp.52-59,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4295
8.

国際会議録
国際会議録
8. Measurement of effective source shift using a grating-pinhole mask
Sato,K. ; Tanaka,S. ; Fujisawa,T. ; Inoue,S.
出版情報: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.99-107,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3679
9.

国際会議録
国際会議録
9. Estimation of IR transparency of ZnCl2-KBr glass by molecular dynamics
Inoue,S. ; Tamaki,M. ; Kawazoe,H. ; Yamane,M.
出版情報: Halide glasses : proceedings of the Fourth International Symposium on Halide Glasses, held in Monterey, California, U.S.A., 26-29 January 1987.  Pt.2  pp.609-614,  1987.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 19-20
10.

国際会議録
国際会議録
10. Glass forming tendency of ZrF4-BaF2 systems containing chlorides
Inoue,S. ; MacFarlane,D.R.
出版情報: Halide glasses : proceedings of the Fourth International Symposium on Halide Glasses, held in Monterey, California, U.S.A., 26-29 January 1987.  Pt.1  pp.27-32,  1987.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 19-20