Ingle, N. K. ; Theodoropoulos, C. ; Mountziaris, T. J. ; Wexler, R. M. ; Smith, F. T. J.
出版情報:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.177-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Gorsuch, G. ; Jin, Y. ; Ingle, N. K. ; Mountziaris, T. J. ; Yu, W.-Y. ; Petrou, A.
出版情報:
Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.. pp.151-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
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