1.

国際会議録
国際会議録
1. Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity
Imafuku, D. ; Mizubayashi, W. ; Miyazaki, S. ; Hirose, M. ; Wakayama, Y. ; Kobayashi, S.
出版情報: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.101-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 477
2.

国際会議録
国際会議録
2. Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity
Imafuku, D. ; Mizubayashi, W. ; Miyazaki, S. ; Hirose, M. ; Wakayama, Y. ; Kobayashi, S.
出版情報: Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A..  pp.161-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 473