Wafer-level packaging of pressure sensor using SU8 photoresist
- 著者名:
- Iliescu, C. I. ( Institute of Biaengineering and Nanotechnology (Singapore) )
- Tay, F. E. H. ( Institute of Bioengineering and Nanotechnology (Singapore) and National Univ. of Singapore (Singapore) )
- Miao, J. ( Nanyang Technological Univ. (Singapore) )
- Avram, M. ( National Institute for Research and Development in Microtechnologies (Romania) )
- 掲載資料名:
- Smart structures, devices, and systems II : 13-15 December 2004, Sydney, Australia
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5649
- 発行年:
- 2004
- 開始ページ:
- 297
- 終了ページ:
- 305
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456090 [0819456098]
- 言語:
- 英語
- 請求記号:
- P63600/5649-1
- 資料種別:
- 国際会議録
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SPIE - The International Society of Optical Engineering |
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SPIE - The International Society of Optical Engineering |
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SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |