Amorphous-silicon thin film transistor with two-step exposure process
- 著者名:
Chen,P.-F. ( Industrial Technology Research Institute ) Chen,J.-H. Chen,D.-I. Sung,H.-J. Hwang,J.-W. Lu,I.-M. - 掲載資料名:
- Display technologies III : 26-27 July 2000, Taipei, Taiwan
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4079
- 発行年:
- 2000
- 開始ページ:
- 217
- 終了ページ:
- 220
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437181 [0819437182]
- 言語:
- 英語
- 請求記号:
- P63600/4079
- 資料種別:
- 国際会議録
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12
国際会議録
HYDROGENATION EFFECT OF AMORPHOUS SILICON THIN FILM TRANSISTORS BY ATMOSPHERIC PRESSURE CVD
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