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PROGRESS TOWARD ATOMIC LAYER EPITAXY OF DIAMOND USING RADICAL CHEMISTRY

著者名:
掲載資料名:
Proceedings of the Third International Symposium on Diamond Materials
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1993-17
発行年:
1993
開始ページ:
516
終了ページ:
520
総ページ数:
5
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770606 [1566770602]
言語:
英語
請求記号:
E23400/932032
資料種別:
国際会議録

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