Hsiu-Wu Guo ; Chen-Luen Shih ; Joe Ketterl ; Scott Dunham
出版情報:
Amorphous and polycrystalline thin-film silicon science and technology--2006 : symposium held April 18-21, 2006, San Francisco, California, U.S.A.. pp.523-528, 2007. Warrendale, Pa.. Materials Research Society
Semiconductor defect engineering--materials, synthetic structures and devices II : symposium held April 9-13, 2007, San Francisco, California, U.S.A.. pp.239-244, 2007. Warrendale, Pa.. Materials Research Society
Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.. pp.129-134, 2008. Warrendale, Pa.. Materials Research Society
国際会議録
