1.

国際会議録
国際会議録
1. CHARACTERIZATION OF PROCESS UNIFORMITY AND CONTROL OF TITANIUM SILICIDE FORMED BY RAPID THERMAL PROCESSING (RTP)
Hodul, David ; Mehta, Sandeelp
出版情報: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.183-190,  1987.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 92
2.

国際会議録
国際会議録
2. PROCESS AND EQUIPMENT ISSUES IN RAPID THERMAL OXIDATION (RTO)
Mehta, Sandeep ; Hodul, David
出版情報: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.95-102,  1987.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 92