Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.. pp.83-88, 2006. Warrendale, Pa.. Materials Research Society
Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993. pp.220-237, 1993. Pennington, NJ. Electrochemical Society
Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.. pp.255-260, 1989. Pittsburgh, Pa.. Materials Research Society
Lefakis, H. ; Liehr, M. ; Rubloff, G.W. ; Ho, P.S.
出版情報:
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA. pp.133-138, 1985. Pittsburgh, Pa.. Materials Research Society
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA. pp.469-478, 1985. Pittsburgh, Pa.. Materials Research Society
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA. pp.485-492, 1985. Pittsburgh, Pa.. Materials Research Society
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA. pp.153-158, 1985. Pittsburgh, Pa.. Materials Research Society