Takakura, M. ; Yasaka, T. ; Miyazaki, S. ; Hirose, M.
出版情報:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.113-118, 1992. Pittsburgh, Pa.. Materials Research Society
Yasaka, T. ; Uenaga, S. ; Yasutake, H. ; Takakura, M. ; Miyazaki, S. ; Hirose, M.
出版情報:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.385-390, 1992. Pittsburgh, Pa.. Materials Research Society
Yasaka, T. ; Takakura, M. ; Miyasaki, S. ; Hirose, M.
出版情報:
Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A.. pp.225-232, 1991. Pittsburgh. Materials Research Society
Hirose, M. ; Mizubayashi, W. ; Fukuda, M. ; Miyazaki, S.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.730-744, 1998. Pennington, NJ. Electrochemical Society
Sasaki, Y. ; Maeda, J. ; Koishi, T. ; Hashimoto, K. ; Shibahara, K. ; Yokoyama, S. ; Miyazaki, S. ; Hirose, M.
出版情報:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.207-213, 1997. Pennington, NJ. Electrochemical Society
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.82-96, 2002. Pennington, NJ. Electrochemical Society
Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.. pp.357-368, 1987. Pittsburgh, Pa.. Materials Research Society
Miyazaki, S. ; Shin, H. ; Okamoto, K. ; Hirose, M.
出版情報:
Wide band gap semiconductors : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.681-686, 1992. Pittsburgh, Pa.. Materials Research Society
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