Teerlinck, I. ; Schmidt, H.F. ; Rotondaro, A.L.P. ; Hurd, T.Q. ; Mouche, L. ; Mertens, P.W. ; Meuris, M. ; Heyns, M.M. ; Vanhaeren, D. ; Vandervorst, W.
出版情報:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.284-291, 1995. Pennington, NJ. Electrochemical Society
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.277-283, 1995. Pennington, NJ. Electrochemical Society
Mertens, P.W. ; Hurd, T.Q. ; Graf, D. ; Meuris, M. ; Schmidt, H.F. ; Heyns, M.M.
出版情報:
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.241-252, 1994. Pennington, NJ. Electrochemical Society
Teerlinek, I. ; Gomes, W.P. ; Strubbe, K. ; Mertens, P.W. ; Heyns, M.M.
出版情報:
Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium. pp.156-159, 1999. Pennington, N.J.. Electrochemical Society
Trauwaert, M.-A. ; Kenis, K. ; Caymax, M. ; Mertens, P.W. ; Heyns, M.M. ; Vanhellemont, J. ; Graf, D. ; Wagner, P.
出版情報:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.455-462, 1997. Pennington, NJ. Electrochemical Society
De Gendt, S. ; Arnauts, S. ; Witters, T. ; Boehme, W. ; Gonchond, J.P. ; Huber, A. ; Lerche, J. ; Loewenstein, L. ; Rink, I. ; Wortelboer, R. ; Mueris, M. ; Heyns, M.M.
出版情報:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.593-600, 1999. Pennington, NJ. Electrochemical Society
Verhaverbeke, S. ; Meuris, M. ; Mertens, P. ; Schmidt, H. ; Heyns, M.M. ; Philipossian, A. ; Graeff, D. ; Dillenbeck, K.
出版情報:
Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993. pp.199-219, 1993. Pennington, NJ. Electrochemical Society
deBokx, P.K. ; Kidd, S.J. ; Wiener, G. ; Urbach, H.P. ; De Gendt, S. ; Mertens, P.W. ; Heyns, M.M.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1511-1523, 1998. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.186-194, 1994. Pennington, NJ. Electrochemical Society