SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.. pp.205-218, 1988. Pittsburgh, Pa.. Materials Research Society
Mertens, P. W. ; McGeary, M. J. ; Schaekers, M. ; Sprey, H. ; Vermeire, B. ; Depas, M. ; Meuris, M. ; Heyns, M. M.
出版情報:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.89-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Rotondaro, A. L. P. ; Hurd, T. Q. ; Schmidt, H. F. ; Teerlinck, I. ; Heyns, M. M. ; Claeys, C.
出版情報:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.183-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.307-, 1999. Warrendale, PA. MRS - Materials Research Society
Gendt, S. de ; Kenis, K. ; Baeyens, M. ; Mertens, P. W. ; Heyns, M. M. ; Wiener, G. ; Kidd, S. J. ; Knotter, D. M. ; Bokx, P. K. de
出版情報:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.397-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Elshocht, S. Van ; Carter, R. ; Caymax, M. ; Claes, M. ; Conard, T. ; Date, L. ; Gendt, S. De ; Kaushik, V. ; Kerber, A. ; Kluth, J. ; Lujan, G. ; Petry, J. ; Pique, D. ; Richard, O. ; Rohr, E. ; Shimamoto, Y. ; Tsai, W. ; Heyns, M. M.
出版情報:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.59-64, 2003. Warrendale, Pa.. Materials Research Society
Heyns, M. M. ; Verhaverbeke, S. ; Meuris, M. ; Mertens, P. W. ; Schmidt, H. ; Kubota, M. ; Philipossian, A. ; Dillenbeck, K. ; Graf, D. ; Schnegg, A. ; Blank, R. de
出版情報:
Surface chemical cleaning and passivation for semiconductor processing. pp.35-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Mertens, P. W. ; McGeary, M. J. ; Schaekers, M. ; Sprey, H. ; Vermeire, B. ; Depas, M. ; Meuris, M. ; Heyns, M. M.
出版情報:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.. pp.149-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society