Bowden, M. ; Gardiner, D. J. ; Lourenco, M. A. ; Hedley, J. ; Wood, D. ; Burdess, J. S. ; Harris, A. J.
出版情報:
Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.. pp.239-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.925-928, 2004. Uetikon-Zuerich. Trans Tech Publications
Hedley, J. ; Burdess, J. S. ; Harris, A. J. ; Gallacher, B. J. ; McNeil, C. J. ; Cumpson, P. J. ; Enderling, S.
出版情報:
Optical Micro- and Nanometrology in Manufacturing Technology. pp.244-252, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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