Momose, A. ; Yashiro, W. ; Moritake, M. ; Takeda, Y. ; Uesugi, K. ; Takeuchi, A. ; Suzuki, Y. ; Tanaka, M. ; Hattori, T.
出版情報:
Developments in X-ray tomography V : 15-17 August 2006, San Diego, California, USA. pp.63180T-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Friedt, J.M. ; Chevrel, H. ; Hattori, T. ; Takagi, H. ; Boireau, A. ; Ozawa, F.
出版情報:
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.379-388, 1994. Pennington, NJ. Electrochemical Society
Yamanaka, R. ; Hattori, T. ; Mine, T. ; Hattori, K. T. ; Tanaka, T. P. ; Terasawa, T.
出版情報:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.198-204, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Hattori, T. ; Tsuchiya, Y. ; Yokoyama, Y. ; Oizumi, H. ; Morisawa, T. ; Yamaguchi, A. ; Shiraishi, H.
出版情報:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.411-419, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Satsuma, A. ; Ebigase, T. ; Inaki, Y. ; Yoshida, H. ; Kobayashi, S. ; Uddin, Md.A. ; Sakata, Y. ; Hattori, T.
出版情報:
Zeolites and mesoporous materials at the dawn of the 21st century : proceedings of the 13th International Zeolite Conference, Montpellier, France, 8-13 July 2001. pp.277-277, 2001. Amsterdam. Elsevier
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.3-14, 1997. Pennington, NJ. Electrochemical Society
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.589-591, 1998. Pennington, NJ. Electrochemical Society
Takahashi, K. ; Nohira, H. ; Kato, H. ; Tamura, N. ; Hikazutani, K. ; Sano, S. ; Hattori, T.
出版情報:
The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000. pp.181-186, 2000. Pennington, N.J.. Electrochemical Society
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