Hattangady, S. ; Misra, V. ; Yasuda, T. ; Xu, X.L. ; Hornung, B. ; Lucovsky, G. ; Wortman, J.J.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.288-295, 1994. Pennington, NJ. Electrochemical Society
Eason, K. ; Jallepally, R. ; Noble, D. ; Hattangady, S. ; Khamankar, R. ; Rotondaro, A.L.P.
出版情報:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium. pp.195-202, 2000. Pennington, NJ. Electrochemical Society
Kuehne, J. ; Hattangady, S. ; Piccirillo, J. ; Xing, G. C. ; Miner, G. E. ; Lopes, D.
出版情報:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.381-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Kuehne, J. ; Hattangady, S. ; Piccirillo, J. ; Xing, G. C. ; Miner, G. ; Lopes, D. ; Tauber, R.
出版情報:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.181-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Hattangady, S. ; Xu, X-L ; Watkins, M. J. ; Hornung, B. ; Misra, V. ; Lucovsky, G. ; Wortman, J. J.
出版情報:
III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.581-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society