1.

国際会議録
国際会議録
1. GaAs HETEROEPITAXY ON SUBSTRATE-ENGINEERED SILICON USING SiXGe1-X MULTILAYER STRUCTURE
Posthill, J. B. ; Venkatasubramanian, R. ; Malta, D. P. ; Hattangady, S. V. ; Fountain, G. G. ; Timmons,. M. L. ; Markunas, R. J.
出版情報: Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A..  pp.219-224,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 198
2.

国際会議録
国際会議録
2. HETEROEPITAXIAL CXSi1-X/Si(100) METASTABLE ALLOYS
Posthill, J. B. ; Rudder, R. A. ; Hattangady, S. V. ; Fountain, G. G ; Humphreys, T. P. ; Nemanich, R. J. ; Parikh, N. R. ; Markunas, R. J.
出版情報: Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A..  pp.497-502,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 198
3.

国際会議録
国際会議録
3. GALLIUM ARSENIDE SURFACE INVERSION USING A NOVEL SILICON-SILICON DIOXIDE INSULATOR STRUCTURE
Fountain, G. G. ; Rudder, R. A. ; Hattangady, S. V. ; Markunas, R. J. ; Vitkavage, D. J.
出版情報: Advances in materials, processing, and devices in III-V compound semiconductors.  pp.537-544,  1989.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 144
4.

国際会議録
国際会議録
4. 300°C PROCESSING OF Si USING REMOTE PLASMA TECHNIQUES FOR IN SITU CLEANING, EPITAXY, AND OXIDE/NITRIDE/OXIDE DEPOSITIONS
Fountain, G. G. ; Hattangady, S. V. ; Rudder, R. A. ; Posthill, J. B. ; Markunas, R. J.
出版情報: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.139-148,  1989.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 146
5.

国際会議録
国際会議録
5. RBS/CHANNELING AND TEM ANALYSIS OF HETEROEPITAXIAL Ge FILMS ON GaAs GROWN BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Parikh, N. R. ; Hattangady, S. V. ; Posthill, J. B. ; King, M. L. ; Rudder, R. A. ; Vitkavage, D. J. ; Markunas, R. J. ; Chu, W. K.
出版情報: Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A..  pp.275-278,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 102
6.

国際会議録
国際会議録
6. INTEGRATED PROCESSING OF STACKED GATE DIELECTRIC STRUCTURES WITH MULTISTEP REMOTE-PLASMA PROCESSING
Hattangady, S. V. ; Fountain, G. G. ; Alley, R. G. ; Rudder, R. A. ; Markunas, R. J.
出版情報: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.335-340,  1991.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 224
7.

国際会議録
国際会議録
7. COMPOSITIONAL DETERMINATIONS OF OXIDE-NITRIDE-OXIDE STACKED DIELECTRIC
Waytena, G. L. ; Hren, J. ; Weiss, J. k> ; Rez, P. ; Fountain, G. G,. ; Hattangady, S. V.
出版情報: Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A..  pp.197-202,  1992.  Pittsburgh, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 268
8.

国際会議録
国際会議録
8. Integrated Processing of Silicon Oxynitride Alloy Dielectrics by Plasma-Assisted Oxidation, Chemical Vapor Deposition, and On-Line Rapid Thermal Annealing
Hattangady, S. V. ; Niimi, H. ; Gandhi, S. ; Lucovsky, G.
出版情報: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.213-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 387
9.

国際会議録
国際会議録
9. CONTROL OF Si-SiO2 INTERFACE PROPERTIES IN MOS DEVICES PREPARED BY PLASMA-ASSISTED AND RAPID THERMAL PROCESSES
Lucovsky, G. ; Yasuda, T. ; Ma, Y. ; Hattangady, S. V. ; Xu, X-L. ; Misra, V. ; Hornung, B. ; Wortman, J. J.
出版情報: Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.81-,  1994.  Pittsburgh.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 318
10.

国際会議録
国際会議録
10. IN-SITU SURFACE CLEANING OF Ge(111) AND Si(100) FOR EPITAXIAL GROWTH OF Ge AT 300°C USING REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Hattangady, S. V. ; Rudder, R. A. ; Fountain, G. G. ; Vitkavage, D. J. ; Markunas, R. J.
出版情報: Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A..  pp.319-322,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 102