Harendt, C. ; Schuhbauer, A. ; Apel, U. ; Dudek, V. ; Graf, H.-G. ; Hoefflinger, B. ; Penteker, E.
出版情報:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.501-508, 1997. Pennington, NJ. Electrochemical Society
Harendt, C. ; Beintner, J. ; Schunbauer, A. ; Apel, U. ; Dudek, V. ; Graf, H.-G. ; Hoefflinger, B. ; Seger, U.
出版情報:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.568-575, 1997. Pennington, NJ. Electrochemical Society
Glockner, J. ; Harendt, C. ; Neidlinger, T. ; Schubert, M. B.
出版情報:
Flat-panel displays and sensors - principles, materials and processes : symposium held April 4-9, 1999, San Francisco, California, U.S.A.. pp.285-292, 2000. Pittsburgh, Pa.. Materials Research Society
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