Lucovsky, G. ; Ma, Y. ; He, S.S. ; Yasuda, T. ; Stephens, D.J. ; Habermehl, S.
出版情報:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.33-38, 1993. Pittsburgh, Pa.. Materials Research Society
Ma, Y. ; Yasuda, T. ; Habermehl, S. ; Lucovsky, G.
出版情報:
Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.341-348, 1992. Pittsburgh, Pa.. Materials Research Society
Lu, Z. ; Habermehl, S. ; Lucovsky, G. ; Dietz, N. ; Bachmann, K.J. ; Osgood, R.M.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.416-424, 1994. Pennington, NJ. Electrochemical Society
Yasuda, T. ; Ma, Y. ; Habermehl, S. ; Kim, S.S. ; Lucovsky, G. ; Schneider, T.P. ; Cho, J. ; Nemanich R.J.
出版情報:
Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A.. pp.395-400, 1991. Pittsburgh, Pa.. Materials Research Society
He, S. S. ; Stephens, D. J. ; Ma. Y. ; Yasuda, T. ; Habermehl, S. ; Lucovsky, G.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.653-658, 1992. Pittsburgh, Pa.. Materials Research Society
Ma, Y. ; Yasuda, T. ; Habermehl, S. ; He, S.S. ; Stephens, D.J. ; Lucovsky, G.
出版情報:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.69-74, 1992. Pittsburgh, Pa.. Materials Research Society
Ma, Y. ; Yasuda, T. ; Habermehl, S. ; Lucovsky, G.
出版情報:
Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.799-806, 1992. Pittsburgh, Pa.. Materials Research Society
Stevens, G. ; Santos-Filho, P. ; Habermehl, S. ; Lucovsky, G.
出版情報:
Amorphous silicon technology, 1995 : Symposium held April 18-21, 1995, San Francisco, California, U.S.A.. pp.313-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.. pp.107-112, 2002. Warrendale, Pa.. Materials Research Society
Shaw, M.J. ; Guo, J. ; Vawter, G.A. ; Habermehl, S. ; Sullivan, C.T.
出版情報:
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA. pp.109-118, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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