1.

国際会議録
国際会議録
1. Automated OPC optimization using in-line CD-SEM
Su,B. ; Menaker,M. ; Haas,N. ; Subramanian,R. ; Singh,B.
出版情報: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.80-86,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4181
2.

国際会議録
国際会議録
2. Vacancy Formation in Thermal Equilibrium in Ferromagnetic Iron and Cobalt Studied by the Spin Rotation of Pos Positive Muons
Furderer,K. ; Doring,K.-P. ; Gladisch,M. ; Haas,N. ; Herlach,D. ; Major,J. ; Mundinger,H.-J. ; Rosenkranz,J. ; Schafer,W. ; Schimmele,I. ; Schmolz,M. ; Schwarz,W. ; Seeger,A.
出版情報: Vacancies and interstitials in metals and alloys : Proceedings of the International Conference on Vacancies and Interstitials in Metals and Alloys held in Berlin, Germany, September 14-19, 1986.  Pt.1  pp.125-130,  1987.  Aederlmannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 15-18
3.

国際会議録
国際会議録
3. Muon Spin Relaxation Study of Defect Reactions in Electron-Irradiated Nb,Ta and Al
Herlach,D. ; Doring,K.-P. ; Haas,N. ; Furdeter,K. ; Gladisch,M. ; Jacobs,W. ; Mundinger,H.-J. ; Rosenkranz,J. ; Orth,H. ; Schaefer,H.-F. ; Schafer,W. ; Schmolz,M. ; Seeger,A. ; Arnold,K.-P.
出版情報: Vacancies and interstitials in metals and alloys : Proceedings of the International Conference on Vacancies and Interstitials in Metals and Alloys held in Berlin, Germany, September 14-19, 1986.  Pt.1  pp.71-78,  1987.  Aederlmannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 15-18