QUANTITATIVE DISTRIBUTION ANALYSIS OF PHOSPORUS WITH SIMS IN THE LAYER SYSTEM SiO2/Si
- 著者名:
- 掲載資料名:
- Materials characterization : symposium held April 15-17, 1986, Palo Alto California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 69
- 発行年:
- 1986
- 開始ページ:
- 329
- 終了ページ:
- 336
- 総ページ数:
- 8
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837357 [0931837359]
- 言語:
- 英語
- 請求記号:
- M23500/69
- 資料種別:
- 国際会議録
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