Wolf, Ingrid De ; Bellens, Rudi ; Groeseneken, Guido ; Maes, Herman E.
出版情報:
Materials reliability in microelectronics III : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.281-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.265-270, 2005. Warrendale, Pa.. Materials Research Society
Wolf, Ingrid De ; Bellens, Rudi ; Groeseneken, Guido ; Maes, Herman E.
出版情報:
Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.. pp.349-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society