Mertens, P.W. ; Hurd, T.Q. ; Graf, D. ; Meuris, M. ; Schmidt, H.F. ; Heyns, M.M.
出版情報:
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.241-252, 1994. Pennington, NJ. Electrochemical Society
Trauwaert, M.-A. ; Kenis, K. ; Caymax, M. ; Mertens, P.W. ; Heyns, M.M. ; Vanhellemont, J. ; Graf, D. ; Wagner, P.
出版情報:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.455-462, 1997. Pennington, NJ. Electrochemical Society
Schmolke, R. ; Graf, D. ; Suhren, M. ; Kirchner, R. ; Piontek, H. ; Wagner, P.
出版情報:
Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.137-, 1997. Pittsburgh, Penn. MRS - Materials Research Society
Heyns, M. M. ; Verhaverbeke, S. ; Meuris, M. ; Mertens, P. W. ; Schmidt, H. ; Kubota, M. ; Philipossian, A. ; Dillenbeck, K. ; Graf, D. ; Schnegg, A. ; Blank, R. de
出版情報:
Surface chemical cleaning and passivation for semiconductor processing. pp.35-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Kaniava, A. ; Menczigar, U. ; Vanhellemont, J. ; Poortmans, J. ; Rotondaro, A. L. P. ; Gaubas, E. ; Vaitkus, J. ; Koster, L. ; Graf, D.
出版情報:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.389-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.17-, 1995. Pittsburgh, PA. MRS - Materials Research Society