Hahida, M. ; Fujita, M. ; Tsukamoto, M. ; Semerok ,A.F. ; Gobert, O. ; Petite, G. ; Izawa, Y. ; Wagner, J.-F.
出版情報:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.452-457, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Reif, J. ; Costache, F. ; Eckert, S. ; Kouteva-Arguirova, S. ; Bestehorn, M. ; Georgescu, I. ; Semerok, A. F. ; Martin, P. ; Gobert, O. ; Seifert, W.
出版情報:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.737-742, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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